● | This equipment is to apply for substrate in placibis |
● | Possible to apply dicing tapes, PET tapes |
Features | |
○Possible to high temperature apply ○Applicator system without applicator error ○Usable PET tape ○Circle cut system for wafer outer |
○Variable pressure function at applicator roller ○Vacuum meter for confirming of fix ○Usable dicing tape |
Specifications | ||
HTM-08M | HTM-12M | |
Substrate size | Ф8” | Ф12” |
Attach tape | Various roll tape | |
Substrate stage | Whole area contact type with Teflon | |
Alignment | coated with vacuum absorption by visual | |
Work stage temp. | Room temp. ~ 60℃ | |
Attach roller | Urethane rubber variable pressure, max. 10kg/roller |
|
Circle cutter | Cutting wafer outer | |
Straight line cutter | Separate off with roll side | |
Tape separator | Auto-wind roll | |
Power | AC100V 5A 50/60Hz | |
Dimension | 480(W)x750(D)X410(H)mm | 650(W)x810(D)X410(H)mm |
Weight | 20kg | 30kg |
*application for dicing tape is up to 6 inch size | *application for dicing tape is up to 8 inch size |