| ● | This equipment is to apply for substrate in placibis |
| ● | Possible to apply dicing tapes, PET tapes |
| Features | |
| ○Possible to high temperature apply ○Applicator system without applicator error ○Usable PET tape ○Circle cut system for wafer outer |
○Variable pressure function at applicator roller ○Vacuum meter for confirming of fix ○Usable dicing tape |
| Specifications | ||
| HTM-08M | HTM-12M | |
| Substrate size | Ф8” | Ф12” |
| Attach tape | Various roll tape | |
| Substrate stage | Whole area contact type with Teflon | |
| Alignment | coated with vacuum absorption by visual | |
| Work stage temp. | Room temp. ~ 60℃ | |
| Attach roller | Urethane rubber variable pressure, max. 10kg/roller |
|
| Circle cutter | Cutting wafer outer | |
| Straight line cutter | Separate off with roll side | |
| Tape separator | Auto-wind roll | |
| Power | AC100V 5A 50/60Hz | |
| Dimension | 480(W)x750(D)X410(H)mm | 650(W)x810(D)X410(H)mm |
| Weight | 20kg | 30kg |
| *application for dicing tape is up to 6 inch size | *application for dicing tape is up to 8 inch size | |