| ● | This equipment which is generated Ozone by short wavelength UV, is to remove molecular organic contaminants with active oxygen separated off from ozone |
| ● | This equipment is also used for surface modification |

| Features |
|
○It is easy for moving and installation due to small equipment ○It is easy operation and maintenance ○Low cost with simple structure |
| Specifications | ||
| UDM-08M | UDM-12M | |
| UV lamp | Low pressure mercury lamp | |
| Shape of lamp | Ultrafine tube | |
| UV wavelength | 185nm, 254nm | |
| UV intensity | 25~30mW/cm2 | |
| Substrate size | 8” x 8” | 12” x 12” |
| Power supply | AC100V 50/60Hz 5A | |
| Dimension | 330(W)x460(D)x240(H)mm | 430(W)x560(D)x240(H)mm |
| Weight | 15kg | 20kg |
| ※ UV intensity is our test value, not guarantee figures | ||