● | This equipment is to ease of peeling UV tape by UV exposure |
※CCFL type is available in near future |
Features | |
○Adopted black-light(fluorescent) ○Easy operation ○Light weight, compact type ○Equipped pressure and flow meter for N2 |
○Usable various UV tapes ○Easily lamp change ○Low running cost |
Specifications | UCM-12M | UCM-16M |
Substrate size | 8” dicing flame | 12” dicing flame |
UV lamp | Black-light(fluorescent) | |
UV wavelength | 350~360nm | |
UV intensity | 20mW/c㎡ | |
Substrate stage | with N2 chamber | |
Substrate positioning | into counterbore | |
Exposure time | optional setting | |
Cooling | no available | |
N2 | optional adoption | |
Dimension | 430(W)x540(D)x240(H)mm | 660(W)x540(D)x240(H)mm |
Weight | 20kg | 30kg |
※ UV intensity is our test value, not guarantee figures |