| ● | This equipment is to ease of peeling UV tape by UV exposure |
| ※CCFL type is available in near future |

| Features | |
| ○Adopted black-light(fluorescent) ○Easy operation ○Light weight, compact type ○Equipped pressure and flow meter for N2 |
○Usable various UV tapes ○Easily lamp change ○Low running cost |
| Specifications | UCM-12M | UCM-16M |
| Substrate size | 8” dicing flame | 12” dicing flame |
| UV lamp | Black-light(fluorescent) | |
| UV wavelength | 350~360nm | |
| UV intensity | 20mW/c㎡ | |
| Substrate stage | with N2 chamber | |
| Substrate positioning | into counterbore | |
| Exposure time | optional setting | |
| Cooling | no available | |
| N2 | optional adoption | |
| Dimension | 430(W)x540(D)x240(H)mm | 660(W)x540(D)x240(H)mm |
| Weight | 20kg | 30kg |
| ※ UV intensity is our test value, not guarantee figures | ||